CPC H01J 37/32532 (2013.01) [C23C 16/02 (2013.01); C23C 16/0245 (2013.01); C23C 16/4584 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01); H01J 37/32009 (2013.01); H01J 37/32449 (2013.01); H01J 37/32715 (2013.01); H01J 37/32743 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/3341 (2013.01)] | 15 Claims |
1. A method for preparing a protective coating, comprising:
positioning one or more target objects into a chamber, wherein the chamber comprises a movable substrate and one or more trays coupled to the movable substrate configured to hold the one or more target objects such that the one or more target objects are movable within the chamber;
adding a monomer vapor into the chamber;
forming a first layer of a protective coating on surfaces of the one or more target objects using the monomer vapor by performing a first cycle of a chemical vapor deposition process, wherein the first cycle comprises:
in a first pretreatment phase, removing impurities from the surfaces of the one or more target objects and activating the surfaces of the one or more target objects by applying a continuous discharge for a first time duration between 60 to 900 seconds; and
in a first coating phase, forming the first layer of the protective coating on the activated surfaces of the one or more target objects by applying a second type of discharge at a second power level for a second time duration; and
forming a second layer of the protective coating on surfaces of the first layer of the protective coating using the monomer vapor by performing a second cycle of the chemical vapor deposition process, the second layer of protective coating having a different thickness as compared to the first layer of the protective coating, wherein the second cycle comprises:
in a second pretreatment phase, removing impurities from the surfaces of the first layer and activating the surfaces of the first layer by applying the continuous discharge for a second time duration between 60 to 900 seconds; and
in a second coating phase, forming the second layer of the protective coating on the activated surfaces of the first layer by applying a third type of discharge at a third power level for a third time duration that is different than the second time duration.
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