US 11,740,565 B2
Collector flow ring
Taylor John Hartung, San Diego, CA (US); Yue Ma, Escondido, CA (US); Marc Guy Langlois, Rancho Mirage, CA (US); Jeremy Burke, San Diego, CA (US); and Esteban Joseph Sandoval Johnson, Chula Vista, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/784,951
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Dec. 9, 2020, PCT No. PCT/EP2020/085146
§ 371(c)(1), (2) Date Jun. 13, 2022,
PCT Pub. No. WO2021/130017, PCT Pub. Date Jul. 1, 2021.
Claims priority of provisional application 62/970,497, filed on Feb. 5, 2020.
Claims priority of provisional application 62/953,067, filed on Dec. 23, 2019.
Prior Publication US 2023/0010251 A1, Jan. 12, 2023
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70916 (2013.01) [G03F 7/70033 (2013.01); G03F 7/7085 (2013.01); G03F 7/70808 (2013.01)] 20 Claims
OG exemplary drawing
 
9. An extreme ultraviolet (EUV) radiation source comprising:
a laser source configured to generate optical pulses that are configured to irradiate a fuel material at an irradiation location at which the irradiated fuel material is configured to generate a plasma that emits EUV radiation;
a fuel source configured to deliver the fuel material to the irradiation location;
a collector flow ring housing comprising
a plurality of showerhead flow channel outlets configured to output a plurality of first gaseous fluid flows over a plurality of portions of a plasma-facing surface of the collector flow ring housing,
a gutter purge flow channel outlet configured to output a second gaseous fluid flow over a fuel debris-receiving surface of the collector flow ring housing,
a shroud mounting structure configured to support a shroud assembly, and
a cooling flow channel configured to transport a liquid fluid configured to remove heat from at least a portion of the collector flow ring housing during an EUV radiation generation operation of the EUV radiation system.