CPC G03F 7/70916 (2013.01) [G03F 7/70033 (2013.01); G03F 7/7085 (2013.01); G03F 7/70808 (2013.01)] | 20 Claims |
9. An extreme ultraviolet (EUV) radiation source comprising:
a laser source configured to generate optical pulses that are configured to irradiate a fuel material at an irradiation location at which the irradiated fuel material is configured to generate a plasma that emits EUV radiation;
a fuel source configured to deliver the fuel material to the irradiation location;
a collector flow ring housing comprising
a plurality of showerhead flow channel outlets configured to output a plurality of first gaseous fluid flows over a plurality of portions of a plasma-facing surface of the collector flow ring housing,
a gutter purge flow channel outlet configured to output a second gaseous fluid flow over a fuel debris-receiving surface of the collector flow ring housing,
a shroud mounting structure configured to support a shroud assembly, and
a cooling flow channel configured to transport a liquid fluid configured to remove heat from at least a portion of the collector flow ring housing during an EUV radiation generation operation of the EUV radiation system.
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