CPC G01N 33/48721 (2013.01) | 18 Claims |
1. A transducer device for analyzing one or more fluid analytes, the transducer device comprising:
a nanogap sensor over a substrate, the nanogap sensor including a first electrode having a planar shape and a second electrode, the second electrode opposite the first electrode and separated from the first electrode by a nanogap for receiving a liquid analyte, wherein each of the first electrode and the second electrode is parallel to the substrate;
a first interconnect configured to provide electrical connectivity to the first electrode; and
a second interconnect configured to provide electrical connectivity to the second electrode,
wherein:
at least a portion of the second electrode forms a planar, fully-released cantilever suspended directly over at least a majority of the first electrode,
the planar shape of the first electrode and the planar shape of the fully-released cantilever are parallel to one another and function as a parallel plate capacitor;
the first interconnect is in a first layer over the substrate,
the nanogap sensor is in a second layer over the substrate, and
the second interconnect is in a third layer over the substrate, the second layer being between the first layer and the third layer, and the first layer being between the substrate and the second layer.
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