CPC C23C 14/243 (2013.01) [C23C 14/543 (2013.01); F27B 14/00 (2013.01)] | 17 Claims |
1. A thermal evaporation source comprising:
a manifold body including an expansion chamber, a nozzle, and a general sloping shape narrowing from the expansion chamber toward the nozzle;
a crucible having a circumference configured to contain a volume of evaporant and suspended from a top internal surface of the manifold body within the expansion chamber above the nozzle, wherein mechanical members suspend the crucible from the top internal surface and thereby form at least one restriction orifice,
the expansion chamber is a space between the crucible and the manifold body; and
wherein the at least one restriction orifice comprises at least three orifices evenly spaced around the circumference of the crucible,
each of the at least three orifices are at a same distance from the top internal surface of the manifold.
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