CPC B23K 26/032 (2013.01) [B23K 26/046 (2013.01); B23K 26/0648 (2013.01); B23K 26/0665 (2013.01); B23K 26/08 (2013.01); B23K 26/082 (2015.10); B23K 26/40 (2013.01); B23K 2101/40 (2018.08); B23K 2103/50 (2018.08)] | 9 Claims |
1. A method comprising:
generating a laser beam, the laser beam comprising a plurality of pulses;
passing the laser beam sequentially through a first acousto-optic deflector (AOD) and a second AOD and onto a surface of a workpiece; and
while passing the laser beam through the first AOD and second AOD, applying a first chirped RF waveform to the first AOD to output a first diffracted laser beam to the second AOD and applying a second chirped RF waveform to the second AOD to output a second diffracted laser beam, wherein the first diffracted laser beam is diffracted along a first direction and the second diffracted laser beam is diffracted along a second direction perpendicular to the first direction,
wherein applying the first chirped RF waveform and the second chirped RF waveform selectively changes a spot size of the laser beam at the surface of the workpiece on a pulse-by-pulse basis.
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