| US 7,584,012 B2 | ||
| Automatic defect review and classification system | ||
| Takehiro Hirai, Ushiku (Japan); Kazuo Aoki, Hitachinaka (Japan); and Kenji Obara, Kawasaki (Japan) | ||
| Assigned to Hitachi High-Technologies Corporation, Tokyo (Japan) | ||
| Filed on Aug. 24, 2007, as Appl. No. 11/892,583. | ||
| Application 11/892583 is a continuation of application No. 11/451330, filed on Jun. 13, 2006. | ||
| Claims priority of application No. 2005-172808 (JP), filed on Jun. 13, 2005. | ||
| Prior Publication US 2008/0004742 A1, Jan. 03, 2008 | ||
| Int. Cl. G06F 19/00 (2006.01); G06K 9/00 (2006.01) | ||
| U.S. Cl. 700—110 [700/121; 702/35; 702/185; 382/149; 382/224] | 2 Claims |
| 1. An automatic defect review and classification system including at least one automatic defect review apparatus (hereinafter
called “ADR apparatus”) for specifically observing defect portions of a sample and automatically acquiring images and at least
one automatic defect classification apparatus (hereinafter called “ADC apparatus”) for automatically classifying the defects
by using the images acquired by said ADR apparatus in accordance with the kind of the defects, the system further comprising:
a computer which outputs a status for combination of said ADR apparatus and said ADC apparatus to a graphical user interface
(hereinafter called “GUI”);
wherein the computer calculates and displays an ADR processing time from a past history;
wherein the computer calculates and displays an ADC processing time from the past history;
wherein the computer calculates an estimation time on the basis of the calculated ADR and ADC processing times;
wherein the computer decides and displays a number of sets of ADC necessary for executing an ADC processing without delay
for one set of ADR on the basis of the calculated estimation time; and
wherein said ADC apparatus to be connected to said ADR apparatus can be changed manually on the GUI.
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