| US 7,583,012 B2 | ||
| Piezoelectric element and method for manufacturing piezoelectric element | ||
| Eiji Nakashio, Miyagi (Japan); Junichi Honda, Miyagi (Japan); Takashi Tamura, Miyagi (Japan); Koji Suzuki, Miyagi (Japan); Teruo Inaguma, Miyagi (Japan); Manabu Aizawa, Miyagi (Japan); Kazuo Takahashi, Miyagi (Japan); and Tadashi Sakurai, Miyagi (Japan) | ||
| Assigned to Sony Corporation, Tokyo (Japan) | ||
| Filed on Mar. 03, 2006, as Appl. No. 11/367,996. | ||
| Claims priority of application No. P2005-061694 (JP), filed on Mar. 04, 2005; application No. P2005-061695 (JP), filed on Mar. 04, 2005; application No. P2005-061696 (JP), filed on Mar. 04, 2005; application No. P2005-190234 (JP), filed on Jun. 29, 2005; and application No. P2005-378321 (JP), filed on Dec. 28, 2005. | ||
| Prior Publication US 2006/0197415 A1, Sep. 07, 2006 | ||
| Int. Cl. H01L 41/08 (2006.01) | ||
| U.S. Cl. 310—358 [310/330; 310/331; 310/364] | 10 Claims |
| 1. A piezoelectric element comprising:
a substrate;
a first electrode film disposed on the substrate;
a piezoelectric film disposed on the first electrode film; and
a second electrode film disposed on the piezoelectric film,
wherein,
the piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films,
the first electrode film comprises a laminated film of a titanium layer and a platinum layer, the titanium layer having a
thickness within the range of 5 nm or more to 20 nm or less, and
the second electrode film comprises separate portions providing a driving electrode and at least one detection electrode.
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