| US 7,582,890 B2 | ||
| Magnetic tunnel junction structures having bended tips at both ends thereof, magnetic random access memory cells employing the same and photomasks used in formation thereof | ||
| Young-Ki Ha, Suwon-si (Korea, Republic of); Jang-Eun Lee, Suwon-si (Korea, Republic of); Se-Chung Oh, Yongin-si (Korea, Republic of); Jun-Soo Bae, Hwaseong-si (Korea, Republic of); Hyun-Jo Kim, Hwaseong-si (Korea, Republic of); and Kyung-Tae Nam, Suwon-si (Korea, Republic of) | ||
| Assigned to Samsung Electronics Co., Ltd., (Korea, Republic of) | ||
| Filed on Apr. 11, 2005, as Appl. No. 11/103,078. | ||
| Claims priority of application No. 10-2004-0026689 (KR), filed on Apr. 19, 2004. | ||
| Prior Publication US 2005/0230771 A1, Oct. 20, 2005 | ||
| Int. Cl. H01L 27/20 (2006.01) | ||
| U.S. Cl. 257—9 [257/2; 257/3; 257/4; 257/5; 257/7; 257/E21.665] | 34 Claims |
| 1. A magnetic tunnel junction structure having a pinned layer pattern, a tunneling insulation layer pattern and a free layer
pattern, which are stacked on an integrated circuit substrate, at least the free layer pattern comprising:
a rectangular main body having first and second sides that face each other, the first side of the main body being along an
outer surface of at least the free layer pattern, a third side extended from one end of the first side to contact one end
of the second side, and a fourth side extended from the other end of the first side to contact the other end of the second
side;
a first tip protruding from a first vertex corresponding to a contact point of the second and third sides, an outer surface
of the first tip contacting the second and third sides, and the first tip being bent to have a configuration of a rounded
curve, wherein the first vertex is on a same side of the first tip as a center of curvature of the rounded curve of the first
tip; and
a second tip protruding from a second vertex corresponding to a contact point of the second and fourth sides, an outer surface
of the second tip contacting the second and fourth sides, and the second tip being bent to have a configuration of a rounded
curve, wherein the second vertex is on a same side of the second tip as a center of curvature of the rounded curve of the
second tip, and wherein the first and second tips expose the first and second sides.
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