| US 7,582,569 B2 | ||
| Distributor and distributing method, plasma processing system and method, and process for fabricating LCD | ||
| Tadahiro Ohmi, 1-17-301, Komegafukuro 2-chome, Aoba-ku, Sendai-shi, Miyagi 980-0813 (Japan); Naohisa Goto, 8-1, Shiroyamate 2-chome, Hachioji-shi, Tokyo 193-0825 (Japan); Nobuhiro Kuga, Kanagawa (Japan); and Akihiko Hiroe, Kanagawa (Japan) | ||
| Assigned to Tokyo Electron Limited, Tokyo (Japan); Tadahiro Ohmi, Sendai-shi (Japan); and Naohisa Goto, Hachioji-shi (Japan) | ||
| Appl. No. 10/591,294 PCT Filed Mar. 10, 2004, PCT No. PCT/JP2004/003086 § 371(c)(1), (2), (4) Date Aug. 31, 2006, PCT Pub. No. WO2005/088763, PCT Pub. Date Sep. 22, 2005. |
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| Prior Publication US 2007/0133919 A1, Jun. 14, 2007 | ||
| Int. Cl. H01L 21/302 (2006.01) | ||
| U.S. Cl. 438—728 [438/710; 438/732; 156/345.42] | 18 Claims |
| 1. A distributor comprising:
an oscillator which outputs electromagnetic waves;
a first square waveguide to be connected to said oscillator;
a second square waveguide having a plurality of openings; and
a plurality of radiation waveguides arrayed in a widthwise direction perpendicular to tube axes,
wherein said first square waveguide and said second square waveguide communicate with each other through a communication hole
formed in a first narrow wall of each of said first square waveguide and said second square waveguide,
wherein said second square waveguide communicates with radiation waveguides through the plurality of openings,
wherein said first square waveguide comprises a first guide wall which projects from a second narrow wall toward the communication
hole and guides the electromagnetic waves propagating in said first square waveguide toward the communication hole, and
wherein electromagnetic waves reflected by said first guide wall that travel in an opposite direction in said first square
waveguide cancel the electromagnetic waves which are reflected by an end of said first square waveguide.
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