| US 7,582,359 B2 | ||
| Apparatus and method of monitoring operating parameters of a gas turbine | ||
| Stephen M. Sabol, Orlando, Fla. (US); Ramesh Subramanian, Oviedo, Fla. (US); and Anand A. Kulkarni, Orlando, Fla. (US) | ||
| Assigned to Siemens Energy, Inc., Orlando, Fla. (US) | ||
| Filed on Nov. 08, 2005, as Appl. No. 11/269,043. | ||
| Application 11/269043 is a continuation in part of application No. 11/122566, filed on May 05, 2005. | ||
| Application 11/122566 is a continuation in part of application No. 11/018816, filed on Dec. 20, 2004, granted, now 7,270,890. | ||
| Application 11/018816 is a continuation in part of application No. 10/252236, filed on Sep. 23, 2002, granted, now 6,838,157. | ||
| Claims priority of provisional application 60/581662, filed on Jun. 21, 2004. | ||
| Prior Publication US 2006/0056959 A1, Mar. 16, 2006 | ||
| Int. Cl. B32B 9/00 (2006.01) | ||
| U.S. Cl. 428—469 [428/472; 428/701; 702/182] | 25 Claims |
| 1. A component for use in a combustion turbine, the component comprising:
a substrate;
a MEMS device affixed to the substrate; and
at least one connector in electrical communication with the MEMS device for routing a data signal from the MEMS device to
a termination location.
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