| US 7,581,140 B1 | ||
| Initiating test runs based on fault detection results | ||
| Alexander J. Pasadyn, Austin, Tex. (US); Elfido Coss, Jr., Austin, Tex. (US); Brian K. Cusson, Austin, Tex. (US); and Naomi M. Jenkins, Round Rock, Tex. (US) | ||
| Assigned to Advanced Micro Devices, Inc., Austin, Tex. (US) | ||
| Filed on Dec. 18, 2002, as Appl. No. 10/323,529. | ||
| Int. Cl. G06F 11/00 (2006.01) | ||
| U.S. Cl. 714—37 | 19 Claims |
| 1. A method, comprising:
receiving operational data associated with processing a workpiece by a processing tool;
processing the operational data to determine fault detection results;
causing a test run to be performed based on at least a portion of the fault detection results;
wherein processing comprises detecting a fault associated with the processing of the workpiece and classifying the fault and
determining a particular type of test run to be performed based on the classification of the fault; and
further comprising receiving operational data associated with a processing of the workpiece from an upstream processing tool,
and determining a type of test run to be performed based on the operational data received from the processing of the workpiece
from the upstream processing tool.
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