| US 7,580,767 B2 | ||
| Methods of and apparatuses for maintenance, diagnosis, and optimization of processes | ||
| Paul Douglas MacDonald, Tracy, Calif. (US); Michiel V. P. Krüger, Berkeley, Calif. (US); Michael Welch, Livermore, Calif. (US); Mason L. Freed, Pleasant Hill, Calif. (US); and Costas J. Spanos, Lafayette, Calif. (US) | ||
| Assigned to KLA-Tencor Corporation, San Jose, Calif. (US) | ||
| Filed on Jul. 11, 2005, as Appl. No. 11/179,440. | ||
| Claims priority of provisional application 60/586892, filed on Jul. 10, 2004. | ||
| Prior Publication US 2007/0055403 A1, Mar. 08, 2007 | ||
| Int. Cl. G06F 19/00 (2006.01) | ||
| U.S. Cl. 700—108 [702/182] | 21 Claims |
| 1. A system for operation of processes and process tools for processing workpieces, the system comprising;
a computer memory for storing information;
a design of experiments module configured for generating a design of experiments for characterizing the processes and process
tools, wherein the design of experiments specifies experiments needed to collect sufficient data for characterizing a process
and process tool, the design of experiments module being connected with the memory for retrieving information for preparing
the design of experiments and for storing the design of experiments in the memory;
a data source for providing process data for the design of experiments, the data source being configured for storing and retrieving
data in the memory, an information processor connected with one or more sensors for receiving signals from the sensors, the
information processor being configured for data communication with the memory, the sensor apparatus being configured for measuring
process parameters substantially equivalent to those experienced by the workpieces;
a data analysis module for validating and screening the process data, the data analysis module being connected with the memory
so as to store and retrieve information; and
a perturbation model builder for providing a perturbation model representing the performance of the processes and process
tools, the perturbation model builder being configured for retrieving information from the memory for building the model,
and
storing the perturbation model.
|