| US 7,579,747 B2 | ||
| Electrostatic actuator | ||
| Isao Takahashi, Miyagi-ken (Japan) | ||
| Assigned to Alps Electric Co., Ltd., Tokyo (Japan) | ||
| Filed on May 15, 2008, as Appl. No. 12/121,651. | ||
| Application 12/121651 is a continuation of application No. PCT/JP2006/322806, filed on Nov. 16, 2006. | ||
| Claims priority of application No. 2005-334581 (JP), filed on Nov. 18, 2005. | ||
| Prior Publication US 2008/0224565 A1, Sep. 18, 2008 | ||
| Int. Cl. H01N 1/00 (2006.01) | ||
| U.S. Cl. 310—309 [318/116] | 10 Claims |
| 1. An electrostatic actuator comprising:
a stator having a plurality of protruding electrodes formed on a surface of a base material, the surface serving as a counter
surface; and
a mover disposed so as to face the stator, the mover having a plurality of protruding electrodes formed on a surface of a
base material, the surface serving as a counter surface, a side surface of each of the protruding electrodes of the stator
facing a side surface of a corresponding one of the protruding electrodes of the mover;
wherein planar electrodes are formed on at least one of the counter surface of the stator and the counter surface of the mover
in a portion other than a portion where the protruding electrodes are formed, and the planar electrodes face end surfaces
of the protruding electrodes formed on the other of the counter surface of the stator and the counter surface of the mover.
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