| 1. A method of analyzing a sample by irradiating the sample with an electron beam, spectrally dispersing and detecting characteristic
X-rays emanating from the sample in response to the irradiation by a wavelength-dispersive X-ray spectrometer, and measuring
intensities of the characteristic X-rays at positions where characteristic X-ray peaks are detected,
wherein background intensities of the characteristic X-rays at the positions where the characteristic X-ray peaks are detected
are found based on a mean atomic number calculated using values derived by quantitative analysis based on the intensities
of the characteristic X-rays measured by an energy-dispersive X-ray spectrometer at corresponding analysis positions on the
sample, and
wherein the background intensities are subtracted from the peak intensities at the positions where the characteristic X-ray
peaks are detected by the wavelength-dispersive X-ray spectrometer, thus finding net characteristic X-ray intensities.
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