US 7,578,943 B2
Liquid discharge head and producing method therefor
Rei Kurashima, Yokohama (Japan); Takashi Ushijima, Yokohama (Japan); and Koichiro Nakanishi, Tokyo (Japan)
Assigned to Canon Kabushiki Kaisha, Tokyo (Japan)
Filed on May 19, 2006, as Appl. No. 11/436,633.
Claims priority of application No. 2005-148894 (JP), filed on May 23, 2005.
Prior Publication US 2006/0261034 A1, Nov. 23, 2006
Int. Cl. G11B 5/127 (2006.01)
U.S. Cl. 216—27  [216/80; 216/99; 347/47] 3 Claims
OG exemplary drawing
 
1. A producing method for a liquid discharge head including plural pressure generating chambers respectively provided with pressure generating elements, plural nozzle holes respectively communicating with the plural pressure generating chambers and adapted to discharge a liquid, and a reservoir with which the plural pressure generating chambers commonly communicate respectively through communicating parts, the reservoir being provided with a shallow portion having a depth less than a depth of a communicating portion in the reservoir, the communicating portion being in a vicinity of at least one of the communicating parts, the method comprising:
a step of executing an etching in a portion corresponding at least to the communicating portion on one of two principal planes of a substrate, thereby forming a predetermined recessed portion on the one of the principal planes;
a step of executing an etching in a portion corresponding to the reservoir and the predetermined recess portion, on the one of the two principal planes of the substrate, thereby forming a recessed portion constituting the reservoir having the shallow portion on the one of two principal planes; and
a step of executing an etching in a portion corresponding to the pressure generating chamber on the other of the two principal planes, thereby forming a recessed portion constituting the pressure generating chamber, which communicates with the at least one of the communicating parts on the other of the two principal planes.