| US 7,578,647 B2 | ||
| Load port configurations for small lot size substrate carriers | ||
| Martin R. Elliott, Round Rock, Tex. (US); Michael R. Rice, Pleasanton, Calif. (US); Jeffrey C. Hudgens, San Francisco, Calif. (US); Eric A. Englhardt, Palo Alto, Calif. (US); and Victor Belitsky, Sunnyvale, Calif. (US) | ||
| Assigned to Applied Materials, Inc., Santa Clara, Calif. (US) | ||
| Filed on Feb. 04, 2005, as Appl. No. 11/51,504. | ||
| Application 11/051504 is a continuation in part of application No. 10/764820, filed on Jan. 26, 2004. | ||
| Claims priority of provisional application 60/443153, filed on Jan. 27, 2003. | ||
| Claims priority of provisional application 60/542519, filed on Feb. 05, 2004. | ||
| Prior Publication US 2005/0232734 A1, Oct. 20, 2005 | ||
| Int. Cl. B65G 65/34 (2006.01) | ||
| U.S. Cl. 414—411 [414/937] | 10 Claims |
| 1. A load port configuration comprising:
a plurality of small lot substrate carrier load port locations adapted to be positioned within, and collectively engage, a
large lot substrate carrier opening, each of the plurality of small lot substrate carrier load port locations comprising a
small lot substrate carrier load port, and each of the plurality of small lot substrate carrier load port locations adapted
to support a small lot substrate carrier within the large lot substrate carrier opening;
wherein the large lot substrate carrier opening comprises a single orifice adapted to accommodate a large lot substrate carrier
adapted to carry a maximum of more than 12 substrates;
wherein the small lot substrate carrier is adapted to carry a maximum of fewer than 13 substrates; and
wherein each small lot substrate carrier load port location comprises an opening apparatus for opening a small lot substrate
carrier door of a small lot substrate carrier substrate carrier, the opening apparatus comprising:
a supporting member adapted to:
support the small lot substrate carrier door at a load port;
allow removal of the small lot substrate carrier door from the small lot substrate carrier; and
pivot the small lot substrate carrier door after removal below a bottom surface of the small lot substrate carrier.
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