| US 7,578,176 B2 | ||
| Systems and methods for utilizing scanning probe shape characterization | ||
| Tianming Bao, Frisco, Tex. (US); Hao-Chih Liu, Goleta, Calif. (US); Gregory A. Dahlen, Santa Barbara, Calif. (US); and Rohit Jain, Ventura, Calif. (US) | ||
| Assigned to Veeco Metrology, Inc., Santa Barbara, Calif. (US) | ||
| Filed on Dec. 22, 2006, as Appl. No. 11/645,092. | ||
| Prior Publication US 2008/0154521 A1, Jun. 26, 2008 | ||
| Int. Cl. G01N 13/10 (2006.01); G12B 21/02 (2006.01) | ||
| U.S. Cl. 73—105 [73/1.89; 702/34; 702/104; 977/878; 977/881] | 36 Claims |
| 1. A method for making nanoscale measurements using a scanning probe, the method comprising:
performing a plurality of probe characterizations;
substantially automatically analyzing the plurality of probe characterizations to infer a trend associated with at least one
tip shape attribute of the scanning probe;
using the scanning probe to obtain data from a sample; and
utilizing the data and the trend to compute a measurement of the sample that accounts for changes to the scanning probe.
|