| US 7,576,223 B2 | ||
| Chemical amplification type resist composition | ||
| Airi Yamada, Ibaraki (Japan); Yasunori Uetani, Tsukuba (Japan); and Akira Kamabuchi, Ashiya (Japan) | ||
| Assigned to Sumitomo Chemical Company, Limited, Osaka (Japan) | ||
| Filed on May 29, 2008, as Appl. No. 12/155,072. | ||
| Application 12/155072 is a division of application No. 11/643662, filed on Dec. 22, 2006, granted, now 7,396,899. | ||
| Application 11/643662 is a division of application No. 10/682038, filed on Oct. 10, 2003, granted, now 7,160,669. | ||
| Claims priority of application No. 2002-301517 (JP), filed on Oct. 16, 2002. | ||
| Prior Publication US 2008/0269506 A1, Oct. 30, 2008 | ||
| Int. Cl. C07D 333/46 (2006.01); C07D 335/02 (2006.01) | ||
| U.S. Cl. 549—13 [549/79] | 7 Claims |
1. A sulfonium salt of the formula (Ia)
 wherein Q1 and Q2 each independently represent alkyl having 1 to 6 carbon atoms or cycloalkyl having 3 to 10 carbon atoms, or Q1 and Q2 bond to form divalent acyclic hydrocarbon having 3 to 7 carbon atoms which form a ring together with the adjacent S+; Q3, Q6 and Q7 each independently represent hydrogen or methyl; Q4 represents a group of the formula (X)
 wherein T represents hydrogen, alkyl having 1 to 10 carbon atoms or cycloalkyl having 3 to 10 carbon atoms, Z represents hydrogen,
alkyl having 1 to 10 carbon atoms or cycloalkyl having 3 to 10 carbon atoms, K represents a divalent group selected from the
group consisting of the following formulae
 n denotes an integer of from 0 to 10, and p denotes an integer of from 0 to 3, when n or p is 2 or more, each T may be the
same or different and when n is 2 or more, each K may be the same or different;
n1 denotes 0 or natural number; and Q5 represents perfluoroalkyl having 1 to 8 carbon atoms, alkyl having 1 to 8 carbon atoms or aromatic group having 6 to 12 carbon
atoms which may be substituted; or camphor group;
with the proviso that when n1 denotes 0, n denotes an integer of from 1 to 10, and when n1 denotes 1 and n denotes 0, Z is not alkyl.
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