US 7,575,705 B2
Method for manufacturing a magnetic recording medium utilizing first and second imprint stampers
Masatoshi Sakurai, Tokyo (Japan); and Yoshiyuki Kamata, Tokyo (Japan)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (Japan)
Filed on Mar. 27, 2007, as Appl. No. 11/691,774.
Application 11/691774 is a division of application No. 10/945030, filed on Sep. 21, 2004, abandoned.
Claims priority of application No. 2003-330266 (JP), filed on Sep. 22, 2003; and application No. 2003-342541 (JP), filed on Sep. 30, 2003.
Prior Publication US 2007/0211592 A1, Sep. 13, 2007
Int. Cl. B28B 3/00 (2006.01); G11B 5/70 (2006.01)
U.S. Cl. 264—319  [264/293; 428/848.1; 977/887] 4 Claims
OG exemplary drawing
 
1. A method for manufacturing a magnetic recording medium manufacturing imprint stamper comprising:
coating a surface of a stamper material with a first resist film;
forming a mold pattern of quadrilaterals in a first transfer region in the first resist film of the stamper material corresponding to a servo region of a magnetic recording medium by an artificial drawing method;
etching the surface of the stamper material with the first resist film as a mask to preserve a flat surface in a first non-transfer region of the stamper material located in conformity with a data region of the magnetic recording medium so as to form a servo region master imprint stamper which corresponds to the magnetic recording medium using a sector servo system;
applying a second resist film on a substrate and forming recess portions in a region of the second resist film formed on the substrate while locating the region in conformity with the data region of the magnetic recording medium;
filling the recess portions in a surface of the substrate with a self-assembled material;
giving a phase-separation to the self-assembled material in the substrate;
processing by etching the recess portions in the substrate surface so as to form a molded pattern with a plurality of dots arrayed in a form of a hexagonal lattice;
electroforming the molded pattern to thereby produce a data region master imprint stamper having a mold pattern with a plurality of dots arrayed in a form of a hexagonal lattice in a second transfer region corresponding to the data region of the magnetic recording medium;
transferring the mold pattern of the servo region master imprint stamper and the data region master imprint stamper in succession to a same surface of a master substrate so as to form a master having a molded pattern in the same surface thereof; and
electroforming the molded pattern of the master to thereby form a medium imprint stamper having a mold pattern.