| US 7,575,504 B2 | ||
| Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly | ||
| Steven M. Zuniga, Soquel, Calif. (US); Andrew J. Nagengast, Sunnyvale, Calif. (US); and Jeonghoon Oh, Sunnyvale, Calif. (US) | ||
| Assigned to Applied Materials, Inc., Santa Clara, Calif. (US) | ||
| Filed on Apr. 27, 2007, as Appl. No. 11/741,691. | ||
| Claims priority of provisional application 60/867090, filed on Nov. 22, 2006. | ||
| Claims priority of provisional application 60/891705, filed on Feb. 26, 2007. | ||
| Prior Publication US 2008/0119118 A1, May 22, 2008 | ||
| Int. Cl. B24B 7/22 (2006.01) | ||
| U.S. Cl. 451—288 [451/398] | 31 Claims |
| 1. A retaining ring assembly, comprising:
a flexible membrane shaped to provide an annular chamber, the flexible membrane comprising concentric inner and outer side
walls, annular concentric rims extending horizontally from the top edge of the inner and outer side walls, an annular lower
surface, and two annular concentric projections extending downwardly from the annular lower surface; and
an annular retaining ring positioned beneath the flexible membrane, the annular retaining ring comprising an inner surface
configured to circumferentially surround the edge of a substrate to retain the substrate, a lower surface configured to contact
a polishing pad, an annular upper surface, and two annular concentric recesses in the annular upper surface;
wherein the annular concentric projections of the flexible membrane are sized to fit into the annular concentric recesses
of the annular retaining ring.
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