US 11,723,260 B2
Deposition mask, method of fabricating the same, and method of manufacturing display device using the same
Min Ho Moon, Seongnam-si (KR); Jin Oh Kwag, Yongin-si (KR); Seung Yong Song, Suwon-si (KR); Duck Jung Lee, Hwaseong-si (KR); Seul Lee, Hwaseong-si (KR); and Sung Soon Im, Suwon-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Jun. 28, 2020, as Appl. No. 16/914,446.
Claims priority of application No. 10-2019-0113341 (KR), filed on Sep. 16, 2019.
Prior Publication US 2021/0083189 A1, Mar. 18, 2021
Int. Cl. H01L 51/00 (2006.01); H10K 71/16 (2023.01); C23C 14/04 (2006.01); H10K 71/00 (2023.01)
CPC H10K 71/166 (2023.02) [C23C 14/042 (2013.01); H10K 71/00 (2023.02)] 17 Claims
OG exemplary drawing
 
1. A deposition mask for making a display device, the deposition mask comprising:
a frame including a first opening;
a first member disposed above the first opening of the frame and including a first portion surrounding at least one second opening and a second portion disposed in the second opening and physically separated from the first portion; and
a second member disposed on the first member and including a first connecting portion connected to the frame and a second mesh portion overlapping the second portion.