CPC H05K 3/0055 (2013.01) [H05K 2203/085 (2013.01); H05K 2203/1178 (2013.01)] | 19 Claims |
1. A storage device, comprising:
a top panel, a bottom panel, a back panel, a front panel, and two side panels configured to form an enclosed volume;
a plurality of protrusions disposed at inner surfaces of the two side panels and configured to hold a substrate;
a gas diffuser disposed at an inner surface of the back panel and configured to provide a purge gas to the enclosed volume;
an isolation gas device disposed on an inner surface of the top panel and adjacent to a top portion of the front panel, wherein the isolation gas device is configured to inject the purge gas into a front portion of the storage device and in a direction from the top panel toward the bottom panel; and
an isolation gas line disposed on the top panel and configured to connect the isolation gas device to the gas diffuser.
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