CPC H04R 1/023 (2013.01) [H04R 1/086 (2013.01); H04R 2207/021 (2013.01)] | 18 Claims |
1. A micro-filter, comprising a substrate with a back cavity and a film layer provided on the substrate and suspended above the back cavity; wherein the film layer includes through holes distributed thereon, and is made of an amorphous metal film, and
the film layer includes at least one first diaphragm with a tensile stress and at least one second diaphragm with a compressive stress, and the at least one first diaphragm and the at least one second diaphragm are integrated together and are provided to be spaced apart from each other.
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