US 11,722,808 B2
Micro-filter and acoustic device
Yujing Lin, Shandong (CN)
Assigned to Weifang Goertek Microelectronics Co., Ltd., Shandong (CN)
Appl. No. 17/623,304
Filed by Weifang Goertek Microelectronics Co., Ltd., Shandong (CN)
PCT Filed Jul. 5, 2019, PCT No. PCT/CN2019/094776
§ 371(c)(1), (2) Date Dec. 28, 2021,
PCT Pub. No. WO2020/258363, PCT Pub. Date Dec. 30, 2020.
Claims priority of application No. 201910579444.8 (CN), filed on Jun. 28, 2019.
Prior Publication US 2022/0377442 A1, Nov. 24, 2022
Int. Cl. H04R 1/02 (2006.01); H04R 1/08 (2006.01)
CPC H04R 1/023 (2013.01) [H04R 1/086 (2013.01); H04R 2207/021 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A micro-filter, comprising a substrate with a back cavity and a film layer provided on the substrate and suspended above the back cavity; wherein the film layer includes through holes distributed thereon, and is made of an amorphous metal film, and
the film layer includes at least one first diaphragm with a tensile stress and at least one second diaphragm with a compressive stress, and the at least one first diaphragm and the at least one second diaphragm are integrated together and are provided to be spaced apart from each other.