CPC H01L 22/34 (2013.01) [G01R 17/105 (2013.01); G01R 27/02 (2013.01); G01R 27/14 (2013.01); G01R 27/2635 (2013.01); G01R 31/2831 (2013.01); G01R 31/2858 (2013.01); H01L 27/0611 (2013.01)] | 11 Claims |
1. A semiconductor testkey pattern, comprising:
a high density device region; and
a plurality of resistor pairs surrounding the high density device region, wherein each resistor pair comprises two mutually symmetrical resistor patterns, wherein each resistor pattern comprises a plurality of strip-shaped resistor patterns arranged in parallel with each other, and a plurality of wires connect the strip-shaped resistor patterns in series with each other, and wherein the plurality of resistor pairs comprise a plurality of resistor pairs arranged along a first direction, and the remaining part of the testkey pattern comprises a plurality of resistor pairs arranged along a second direction.
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