CPC G03F 7/70625 (2013.01) [G01B 15/00 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01L 22/12 (2013.01); H01J 2237/2817 (2013.01)] | 17 Claims |
1. A method of inspecting a sample using a charged particle beam, the method comprising:
acquiring one or more first measurements associated with a first instance of a feature in a first region of the sample;
acquiring one or more second measurements associated with a second instance of the feature in a second region of the sample; and
determining a combined measurement representing a parameter of the feature based on the one or more first measurements and the one or more second measurements.
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