| CPC G03F 7/70033 (2013.01) [G03F 7/70166 (2013.01); G03F 7/70858 (2013.01); G03F 7/70916 (2013.01)] | 18 Claims |
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1. An extreme ultraviolet (EUV) light generating apparatus comprising:
a vessel including a first end and a second end opposite to each other and providing an internal space extending from the first end to the second end;
a concave mirror adjacent to the first end of the vessel;
a droplet generator configured to supply a droplet to the internal space of the vessel;
a laser light source configured to irradiate a laser beam to the droplet in the internal space of the vessel, the irradiated droplet emitting EUV light; and
a gas jet configured to receive a flow control gas and spray the received flow control gas into the internal space of the vessel,
wherein the gas jet comprises a ring-shaped main body including a plurality of nozzles spaced apart from one another in a circumferential direction,
wherein the plurality of nozzles are configured to spray the received flow control gas in a downward direction extending from the second end of the vessel to the first end of the vessel,
wherein the ring-shaped main body of the gas jet is inserted into a groove formed at an internal wall of the vessel,
wherein the ring-shaped main body of the gas jet comprises a lower surface and an upper surface opposite to each other, a distance between the lower surface of the ring-shaped main body and the first end of the vessel is smaller than a distance between the upper surface of the ring-shaped main body and the first end of the vessel,
wherein each of the plurality of nozzles is an opening of the ring-shaped main body disposed at the lower surface of the ring-shaped main body, and
wherein the opening of the ring-shaped main body is spaced apart from the internal wall of the vessel.
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