CPC G03F 1/24 (2013.01) [G02B 5/0891 (2013.01); G03F 7/7015 (2013.01); G03F 7/70316 (2013.01)] | 16 Claims |
1. A method of manufacturing a Bragg reflector comprising alternating layers of first reflective material layer A and second reflective material layer B, the method comprising:
depositing a uniform first reflective material layer A on a substrate;
forming a first graded interfacial layer on the uniform first reflective material layer A, wherein the first graded interfacial layer comprises a thickness and a density gradient that changes across the thickness;
depositing a uniform second reflective material layer B on the first graded interfacial layer; and
forming a second graded interfacial layer on the uniform second reflective material layer B, wherein the second graded interfacial layer comprises a thickness and a density gradient that changes across the thickness, wherein the Bragg reflector is formed in a physical vapor deposition (PVD) chamber comprising a first material target A and a second material target B, wherein the PVD chamber comprises a rotating shield with a pair of shield holes comprising a first shield hole and a second shield hole.
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