US 11,719,952 B2
Adjustable achromatic collimator assembly for endpoint detection systems
Pengyu Han, San Jose, CA (US); John Anthony O'Malley, San Jose, CA (US); Michael N. Grimbergen, Redwood City, CA (US); Lei Lian, Fremont, CA (US); Upendra Ummethala, Cupertino, CA (US); and Michael Kutney, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Aug. 11, 2020, as Appl. No. 16/947,639.
Prior Publication US 2022/0050303 A1, Feb. 17, 2022
Int. Cl. G02B 27/30 (2006.01); G02B 9/12 (2006.01); G02B 27/00 (2006.01)
CPC G02B 27/30 (2013.01) [G02B 9/12 (2013.01); G02B 27/005 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A collimator assembly comprising:
a collimator housing comprising:
an interface configured to optically couple to a process chamber that has a target surface; and
a port to receive a first optical fiber, wherein the first optical fiber is to deliver, to an enclosure formed by the collimator housing, a first plurality of spectral components of light belonging to a first range of wavelengths and a second plurality of spectral components of light belonging to a second range of wavelengths, wherein the first range is within a 400-700 nm interval of wavelengths and the second range is outside the 400-700 nm interval of wavelength; and
an achromatic lens located, at least partially; within the enclosure formed by the collimator housing, the achromatic lens to:
direct the first plurality of spectral components of light onto the target surface to illuminate a first region on the target surface; and
direct the second plurality of spectral components of light onto the target surface to illuminate a second region on the target surface, wherein the second region is substantially the same as the first region.