CPC G02B 27/30 (2013.01) [G02B 9/12 (2013.01); G02B 27/005 (2013.01)] | 20 Claims |
1. A collimator assembly comprising:
a collimator housing comprising:
an interface configured to optically couple to a process chamber that has a target surface; and
a port to receive a first optical fiber, wherein the first optical fiber is to deliver, to an enclosure formed by the collimator housing, a first plurality of spectral components of light belonging to a first range of wavelengths and a second plurality of spectral components of light belonging to a second range of wavelengths, wherein the first range is within a 400-700 nm interval of wavelengths and the second range is outside the 400-700 nm interval of wavelength; and
an achromatic lens located, at least partially; within the enclosure formed by the collimator housing, the achromatic lens to:
direct the first plurality of spectral components of light onto the target surface to illuminate a first region on the target surface; and
direct the second plurality of spectral components of light onto the target surface to illuminate a second region on the target surface, wherein the second region is substantially the same as the first region.
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