| US 7,573,659 B2 | ||
| Optical element holding apparatus and exposure apparatus | ||
| Ichiro Onuki, Kawasaki (Japan); Kenichi Kobayashi, Utsunomiya (Japan); Kenji Yoshida, Utsunomiya (Japan); and Jun Ota, Utsunomiya (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, (Japan) | ||
| Filed on Oct. 26, 2007, as Appl. No. 11/925,373. | ||
| Claims priority of application No. 2006-291938 (JP), filed on Oct. 27, 2006; and application No. 2006-293429 (JP), filed on Oct. 30, 2006. | ||
| Prior Publication US 2008/0117534 A1, May 22, 2008 | ||
| Int. Cl. G02B 7/02 (2006.01) | ||
| U.S. Cl. 359—822 [359/823] | 4 Claims |
| 1. A holding apparatus for holding an optical element, the apparatus comprising:
a measuring part configured to measure a coordinate of the optical element; and
a driving part configured to move the optical element based on the coordinate measured by the measuring part,
wherein the measuring part includes a first sensor configured to detect a displacement amount of a part of the optical element,
and a second sensor configured to detect that a part of the optical element is located at a predetermined position, and
wherein the measuring part measures a coordinate of the optical element with respect to a translation in a direction of an
optical axis of the optical element, and a coordinate of the optical element with respect to a rotation around an axis orthogonal
to the optical axis.
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