| US 7,573,634 B2 | ||
| Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof | ||
| Uwe Jan Schmidt, Dresden (Germany); Thilo Sandner, Dresden (Germany); Harald Schenk, Dresden (Germany); Alexandre Gatto, Aalen (Germany); Minghong Yang, Berlin (Germany); Jörg Heber, Erfurt (Germany); and Norbert Kaiser, Jena (Germany) | ||
| Assigned to Fraunhofer-Gesellschaft Zür Förderung Der Angewandten Forschung E.V., München (Germany) | ||
| Appl. No. 11/630,175 PCT Filed Jun. 27, 2005, PCT No. PCT/EP2005/006901 § 371(c)(1), (2), (4) Date May 15, 2007, PCT Pub. No. WO2006/000445, PCT Pub. Date Jan. 05, 2006. |
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| Claims priority of application No. 10 2004 030 803 (DE), filed on Jun. 25, 2004. | ||
| Prior Publication US 2008/0068704 A1, Mar. 20, 2008 | ||
| Int. Cl. G02B 5/08 (2006.01) | ||
| U.S. Cl. 359—360 [359/224.1] | 28 Claims |
| 1. A micromechanical mirror with a high-reflection coating for deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral
ranges, comprising:
a substrate;
an aluminium layer deposited on the substrate;
at least one transparent blooming coating covering the aluminum layer, the blooming coating comprising a fluoride layer, an
oxide layer and/or mixed layers thereof; and
at least one compensation layer for stress compensation selected from the group consisting of mixed oxides, SixAlyOzN(1−x−y−z) with 1>x>0.05, 1>y>0, 1>z>0 and 1>x+y>0.7, TixAlyOzN(1−x−y−z) with 1>x>0.05, 1>y>0, 1>z>0 and 1>x+y>0.7, TaxSiyOzN(1−x−y−z) with 1>x>0.05, 1>y>0, 1>z>0 and 1>x+y>0.7, MoxSiyOzN(1−x−y−z) with 1>x>0.05, 1>y>0, 1>z>0 and 1>x+y>0.7 and CoxSiyOzN(1−x−y−z) with 1>x>0, 1>y>0, 0.3>z>0 and 1>x+y>0.7,
wherein the mirror has a high reflectance R of at least 70% at a wavelength in the DUV and VUV spectral ranges with simultaneously
high planarity D of maximum λ/4.
|