| US 7,573,271 B2 | ||
| Apparatus for measuring electric characteristics of semiconductor | ||
| Toshiyuki Samejima, Tokyo (Japan); and Hajime Watakabe, Tokyo (Japan) | ||
| Assigned to National University Corporation Tokyo University of Agriculture and Technology, Tokyo (Japan) | ||
| Appl. No. 11/661,219 PCT Filed Aug. 25, 2005, PCT No. PCT/JP2005/015953 § 371(c)(1), (2), (4) Date May 25, 2007, PCT Pub. No. WO2006/022425, PCT Pub. Date Mar. 02, 2006. |
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| Claims priority of application No. 2004-249197 (JP), filed on Aug. 27, 2004. | ||
| Prior Publication US 2008/0018323 A1, Jan. 24, 2008 | ||
| Int. Cl. G01R 31/00 (2006.01); G01R 31/302 (2006.01) | ||
| U.S. Cl. 324—501 [324/752] | 4 Claims |
| 1. An apparatus for measuring electric characteristic of a semiconductor comprising:
light irradiating means for irradiating light to a characteristic measured semiconductor;
an alternating-current voltage source;
electrodes for applying an alternating-current voltage to said characteristic measured semiconductor from said alternating-current
voltage source;
an impedance regulator connected to said characteristic measured semiconductor in series; and
electric potential measuring means for measuring electric potential at a connection point between said characteristic measured
semiconductor and said impedance regulator, wherein said impedance regulator is regulated so as to have alternating-current
impedance similar to that of said characteristic measured semiconductor, said alternating-current voltage being applied to
said characteristic measured semiconductor in such a manner that electric potential at said connection point between said
characteristic measured semiconductor and said impedance regulator may become zero electric potential, and wherein at least
said characteristic measured semiconductor is applied with a direct-current bias voltage, said direct-current bias voltage
being applied to said characteristic measured semiconductor in the state in which said alternating-current voltage is superimposed
upon said direct-current bias voltage from said alternating-current voltage source.
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