US 7,573,094 B2
Random number generating element
Ryuji Ohba, Kawasaki (Japan); and Shinobu Fujita, Kawasaki (Japan)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (Japan)
Filed on Nov. 29, 2004, as Appl. No. 10/997,943.
Claims priority of application No. 2003-407949 (JP), filed on Dec. 05, 2003.
Prior Publication US 2005/0180219 A1, Aug. 18, 2005
Int. Cl. H01L 29/792 (2006.01)
U.S. Cl. 257—324  [257/405; 257/E29.301; 257/E29.309; 365/185.18; 365/185.28] 30 Claims
OG exemplary drawing
 
1. A random number generating element comprising:
a source region;
a drain region;
a semiconductor channel provided between the source region and the drain region and having a thin-line portion of a width W and a length L, the width W and the length L satisfying W≤(π/10(μm2))/L;
a tunnel insulation film provided on the semiconductor channel; and
a conductive fine particle group containing a plurality of conductive fine particles provided on the tunnel insulation film with a surface density not less than 2.5×1011 cm−2, the conductive fine particles being charge and discharge by electrons tunneling through the tunnel insulation film, the conductive fine particle group being formed over the semiconductor channel; and
a gate region provided over the conductive fine particle group,
wherein the following inequalities are satisfied:
LWDdot≧[RTunnel/RTunnel(Tox=0.8 nm)]0.3 nm/T×exp[0.3 nm×(0.8 nm/T)×(4π(23.1 eV)1/2/h)],
(q/4π∈T)≧26 mV,
[Ddot×d4/3/(W×L1/2)]×[RTunnel/RTunnel(Tox=0.8 nm)]−2/3≧8000×21/2(μm−13/6)
where Ddot represents the surface density of the conductive fine particles, d an average diameter of the conductive fine particles, T a thickness of the tunnel insulation film, Rtunnel a tunnel resistance of the tunnel insulation film per unit area, Rtunnel (Tox=0.8 nm) a tunnel resistance, per unit area, of a tunnel oxide film with a thickness of 0.8 nm, h Plank's constant, q elemental charge, m an effective mass of a tunnel via the tunnel insulation film, and ∈ a dielectric constant of the tunnel insulation film.