| US 7,572,164 B2 | ||
| Method for manufacturing electron-emitting device, methods for manufacturing electron source and image display device using the electron-emitting device | ||
| Toshihiko Takeda, Kanagawa-ken (Japan); Koki Nukanobu, Kanagawa-ken (Japan); and Takuto Moriguchi, Kanagawa-ken (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Jun. 13, 2005, as Appl. No. 11/150,189. | ||
| Claims priority of application No. 2004-179929 (JP), filed on Jun. 17, 2004. | ||
| Prior Publication US 2005/0282458 A1, Dec. 22, 2005 | ||
| Int. Cl. H01J 9/00 (2006.01); H01J 9/12 (2006.01) | ||
| U.S. Cl. 445—46 [445/50; 445/51] | 19 Claims |
| 1. A method for manufacturing a precursor to an electron-emitting device, comprising the steps of:
preparing an electron-emitting member; and
alternately exposing the electron-emitting member to an oxygen-containing gas and a metal-containing gas a plurality of times.
|