| 1. Pumping apparatus using thermal transpiration micropumps, each thermal transpiration micropump comprising at least one
cavity having an inlet connected to an inlet channel of small cross-section and having an outlet connected to an outlet channel,
and including a heater element for heating the segment of the inlet channel that is adjacent to the cavity, a plurality of
such micropumps being connected in series, the apparatus being characterized in that:
the micropumps are distributed on a substrate in a plurality of rows each made up of a plurality of micropumps, thereby building
up a plurality of columns; and
the respective heater elements of the micropumps are each controlled by appropriately controlling a row control conductor
and a column control conductor.
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