| US 7,570,797 B1 | ||
| Methods and systems for generating an inspection process for an inspection system | ||
| David Wang, Sunnyvale, Calif. (US); Patrick Huet, San Jose, Calif. (US); Tong Huang, Sunnyvale, Calif. (US); Martin Plihal, Pleasanton, Calif. (US); Adam Chien-Huei Chen, San Jose, Calif. (US); Mike Van Riet, Morgan Hill, Calif. (US); and Stewart Hill, San Jose, Calif. (US) | ||
| Assigned to KLA-Tencor Technologies Corp., Milpitas, Calif. (US) | ||
| Filed on May 10, 2005, as Appl. No. 11/125,429. | ||
| Int. Cl. G06K 9/00 (2006.01) | ||
| U.S. Cl. 382—145 [250/559.45; 356/237.4; 356/237.5; 382/143; 382/144; 702/83] | 20 Claims |
| 1. A computer-implemented method for generating an inspection process for an inspection system, comprising:
generating initial inspection data for a specimen with the inspection system;
Using a computer or processor to perform the method steps of:
identifying a selected defect in the initial inspection data, wherein said identifying comprises detecting multiple defects
on the specimen having the greatest diversity of one or more characteristics of the multiple defects;
generating inspection data for the selected defect on the specimen at different values of one or more image acquisition parameters
of the inspection system;
determining which of the different values produces the best inspection data for the selected defect; and
selecting the different values determined to produce the best inspection data as values of the one or more image acquisition
parameters to be used for the inspection process.
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