| US 7,569,817 B2 | ||
| Scanning probe apparatus | ||
| Takao Kusaka, Yokohama (Japan); Nobuki Yoshimatsu, Kawasaki (Japan); Susumu Yasuda, Tsukuba (Japan); and Junichi Seki, Yokohama (Japan) | ||
| Assigned to Canon Kabushiki Kaisha, Tokyo (Japan) | ||
| Filed on Dec. 18, 2006, as Appl. No. 11/612,104. | ||
| Claims priority of application No. 2005-370095 (JP), filed on Dec. 22, 2005. | ||
| Prior Publication US 2007/0158559 A1, Jul. 12, 2007 | ||
| Int. Cl. H01J 37/20 (2006.01); G12B 21/24 (2006.01); G01N 13/10 (2006.01) | ||
| U.S. Cl. 250—306 [250/307; 250/309; 250/442.11; 73/105; 977/849; 977/850; 977/851] | 8 Claims |
| 1. A scanning probe apparatus for obtaining information of a sample or processing the sample with relative movement between
the sample and said apparatus, said apparatus comprising:
a probe; and
a sample stage for holding the sample,
wherein the sample stage comprises a sample holding table, a drive element for moving the sample holding table, and a movable
portion movable in a direction in which an inertial force generated during movement of the sample holding table is canceled,
and wherein the sample stage is detachably mountable, integrally with the sample holding table, the drive element, and the
movable portion, to a main assembly of said apparatus.
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