US 7,567,374 B2
Deformable mirrors
Michael Stewart Griffith, Chelmsford (United Kingdom); Sharon Radcliffe, Chelmsford (United Kingdom); Charles Leslie Laycock, Chelmsford (United Kingdom); and Andrew Graham McCarthy, Chelmsford (United Kingdom)
Assigned to BAE Systems plc, London (United Kingdom)
Appl. No. 11/630,252
PCT Filed Jun. 22, 2005, PCT No. PCT/GB2005/002477
§ 371(c)(1), (2), (4) Date Dec. 21, 2006,
PCT Pub. No. WO2005/124425, PCT Pub. Date Dec. 29, 2005.
Claims priority of application No. 04253727 (EP), filed on Jun. 22, 2004; application No. 0413952.3 (GB), filed on Jun. 22, 2004; and application No. 0503115.8 (GB), filed on Feb. 15, 2005.
Prior Publication US 2008/0030824 A1, Feb. 07, 2008
Int. Cl. G02B 26/00 (2006.01); G02B 26/08 (2006.01); G02F 1/00 (2006.01)
U.S. Cl. 359—291  [359/198; 359/237] 36 Claims
OG exemplary drawing
 
1. A controllably-deformable mirror comprising: a first electro-restrictive plate; a mirror surface; a set of electrodes defined as regions on a first surface of the first electro-restrictive plate, the set of electrodes comprising a first electrode and a second electrode; a common electrode on a second surface of the first electro-restrictive plate;
a set of contacts removed from the set of electrodes, the set of contacts including a first contact electrically connected to the first electrode and a second contact electrically connected to the second electrode;
a set of conducting tracks to electrically connect the set of electrodes to the set of contacts;
and a passivation layer interposed between the set of conducting tracks and the set of electrodes and adapted to mutually insulate the set of electrodes.