| US 7,567,018 B2 | ||
| Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch | ||
| Takashi Kawakubo, Yokohama-shi (Japan); Toshihiko Nagano, Kawasaki-shi (Japan); Kazuhide Abe, Kawasaki-shi (Japan); and Michihiko Nishigaki, Kawasaki-shi (Japan) | ||
| Assigned to Kabushiki Kaisha Toshiba, Tokyo (Japan) | ||
| Filed on Apr. 10, 2006, as Appl. No. 11/400,407. | ||
| Claims priority of application No. 2005-178367 (JP), filed on Jun. 17, 2005. | ||
| Prior Publication US 2006/0285255 A1, Dec. 21, 2006 | ||
| Int. Cl. H01L 41/08 (2006.01) | ||
| U.S. Cl. 310—328 [310/331; 310/332; 200/181] | 16 Claims |
| 1. A micro-mechanical device comprising:
a first piezoelectric actuator including a piezoelectric film and lower and upper electrodes interleaving the piezoelectric
film, and extending from a first fixing part on a substrate to a first operating end; and
a second piezoelectric actuator connected to the first piezoelectric actuator via a connecting part at the first operating
end of the first piezoelectric actuator, and extending from the connecting part to a second operating end, the second piezoelectric
actuator being shorter than the first piezoelectric actuator.
|