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US 7,566,938 B2 |
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| Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures |
| Cyril Cabral, Jr., Ossining, N.Y. (US); Alessandro C. Callegari, Yorktown Heights, N.Y. (US); Michael A. Gribelyuk, Poughquag, N.Y. (US); Paul C. Jamison, Hopewell Junction, N.Y. (US); Dianne L. Lacey, Mahopac, N.Y. (US); Fenton R. McFeely, Ossining, N.Y. (US); Vijay Narayanan, New York, N.Y. (US); Deborah A. Neumayer, Danbury, Conn. (US); Pushkar Ranade, Hillsboro, Oreg. (US); and Sufi Zafar, Briarcliff Manor, N.Y. (US) |
| Assigned to International Business Machines Corporation, Armonk, N.Y. (US) |
| Filed on Nov. 17, 2005, as Appl. No. 11/281,032. |
| Application 11/281032 is a division of application No. 10/291334, filed on Nov. 08, 2002, granted, now 6,982,230. |
| Prior Publication US 2006/0138603 A1, Jun. 29, 2006 |
| Int. Cl. H01L 29/76 (2006.01)
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