| US 7,566,582 B2 | ||
| Systems, methods and devices relating to actuatably moveable machines | ||
| H. Charles Tapalian, Seekonk, Mass. (US); and Jason E. Langseth, Malden, Mass. (US) | ||
| Assigned to The Charles Stark Draper Laboratory, Inc., Cambridge, Mass. (US) | ||
| Filed on Oct. 25, 2005, as Appl. No. 11/258,688. | ||
| Prior Publication US 2007/0090483 A1, Apr. 26, 2007 | ||
| Int. Cl. H01L 21/00 (2006.01) | ||
| U.S. Cl. 438—53 [438/50; 257/415; 257/E21.002] | 14 Claims |
| 1. A method of forming at least one actuatably movable machine, the method comprising,
providing a substrate,
providing a first conductive layer disposed on the substrate,
providing an organic thin film layer disposed on the first conductive layer,
providing a second conductive layer disposed on the organic thin film layer, and
flowing current through the organic thin film layer to create at least one enclosed chamber in the organic thin film layer
to form at least one actuatably movable machine, the at least one enclosed chamber being bounded along a first section of
a periphery directly by an actuatable region of the first conductor and along a second section of the periphery by the organic
thin film layer.
|