US 11,706,944 B2
Display device and method of manufacturing display device
Young Seok Baek, Hwaseong-si (KR); Chong Sup Chang, Hwaseong-si (KR); Hana Seo, Suwon-si (KR); and Eui Kang Heo, Seoul (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Oct. 22, 2020, as Appl. No. 17/78,015.
Claims priority of application No. 10-2020-0007361 (KR), filed on Jan. 20, 2020.
Prior Publication US 2021/0226166 A1, Jul. 22, 2021
Int. Cl. H01L 51/52 (2006.01); H10K 50/844 (2023.01); H10K 71/00 (2023.01)
CPC H10K 50/844 (2023.02) [H10K 71/00 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A method of manufacturing a display device, the method comprising:
sequentially forming a first conductive layer, a second conductive layer comprising copper (Cu), a third conductive layer, and a fourth conductive layer on a substrate;
patterning each of the first conductive layer, the second conductive layer, the third conductive layer, and the fourth conductive layer to form a conductive pattern including a first layer, a second layer, a third layer, and a fourth layer sequentially on the substrate, after sequentially forming the first to fourth conductive layers;
removing the entire fourth layer of the conductive pattern;
forming a protective layer covering at least a sidewall of the conductive pattern on the substrate; and
forming a display element on the protective layer.