US 11,706,569 B2
Sound producing cell and manufacturing method thereof
Chiung C. Lo, San Jose, CA (US); Hao-Hsin Chang, New Taipei (TW); Wen-Chien Chen, New Taipei (TW); and Chun-I Chang, Hsinchu County (TW)
Assigned to xMEMS Labs, Inc., Santa Clara, CA (US)
Filed by xMEMS Labs, Inc., Santa Clara, CA (US)
Filed on Oct. 20, 2022, as Appl. No. 18/48,047.
Application 18/048,047 is a division of application No. 17/720,333, filed on Apr. 14, 2022.
Claims priority of provisional application 63/187,357, filed on May 11, 2021.
Prior Publication US 2023/0073046 A1, Mar. 9, 2023
Int. Cl. H04R 25/00 (2006.01); H04R 7/06 (2006.01); H04R 7/18 (2006.01); H04R 31/00 (2006.01)
CPC H04R 7/06 (2013.01) [H04R 7/18 (2013.01); H04R 31/003 (2013.01); B81B 2203/01 (2013.01); B81B 2203/0307 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A manufacturing method of a sound producing cell, comprising:
providing a wafer comprising a first layer and a second layer;
patterning the first layer of the wafer, so as to form at least one trench line;
disposing the wafer on a substrate;
wherein the first layer comprises a membrane, and at least one slit is formed within and penetrates through the membrane because of the at least one trench line;
wherein the membrane comprises a first membrane subpart and a second membrane subpart, wherein the first membrane subpart and the second membrane subpart are opposite to each other;
wherein the first membrane subpart comprises a first anchored edge which is fully or partially anchored, and edges of the first membrane subpart other than the first anchored edge are non-anchored;
wherein the second membrane subpart comprises a second anchored edge which is fully or partially anchored, and edges of the second membrane subpart other than the second anchored edge are non-anchored.