CPC H04R 7/06 (2013.01) [H04R 7/18 (2013.01); H04R 31/003 (2013.01); B81B 2203/01 (2013.01); B81B 2203/0307 (2013.01)] | 4 Claims |
1. A manufacturing method of a sound producing cell, comprising:
providing a wafer comprising a first layer and a second layer;
patterning the first layer of the wafer, so as to form at least one trench line;
disposing the wafer on a substrate;
wherein the first layer comprises a membrane, and at least one slit is formed within and penetrates through the membrane because of the at least one trench line;
wherein the membrane comprises a first membrane subpart and a second membrane subpart, wherein the first membrane subpart and the second membrane subpart are opposite to each other;
wherein the first membrane subpart comprises a first anchored edge which is fully or partially anchored, and edges of the first membrane subpart other than the first anchored edge are non-anchored;
wherein the second membrane subpart comprises a second anchored edge which is fully or partially anchored, and edges of the second membrane subpart other than the second anchored edge are non-anchored.
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