CPC H03H 9/17 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/13 (2013.01); H10N 30/06 (2023.02)] | 18 Claims |
1. An acoustic resonator device comprising:
a substrate having a cavity and comprising a substrate material;
a lateral etch-stop that defines a perimeter of the cavity, the lateral etch-stop comprising a lateral etch-stop material different from the substrate material;
a single-crystal piezoelectric plate attached to the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans the cavity; and
an interdigital transducer (IDT) at the piezoelectric plate such that interleaved fingers of the IDT are at the diaphragm,
wherein the piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm.
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