US 11,705,535 B2
Nano-indent process for creating single photon emitters in a two-dimensional materials platform
Berend T. Jonker, Davidsonville, MD (US); Matthew R. Rosenberger, Arlington, VA (US); Hsun-Jen Chuang, Alexandria, VA (US); Joshua R. Hendrickson, Dayton, OH (US); and Chandriker Kavir Dass, Dayton, OH (US)
Assigned to The Government of the United States of America, as represented by the Secretary of the Navy, Arlington, VA (US)
Filed by The Government of the United States of America, as represented by the Secretary of the Navy, Arlington, VA (US)
Filed on Jul. 1, 2020, as Appl. No. 16/919,024.
Claims priority of provisional application 62/882,936, filed on Aug. 5, 2019.
Prior Publication US 2021/0109127 A1, Apr. 15, 2021
Int. Cl. H01L 33/06 (2010.01); B82Y 20/00 (2011.01); G01Q 80/00 (2010.01); B82Y 40/00 (2011.01); G01Q 60/16 (2010.01); G01Q 60/38 (2010.01)
CPC H01L 33/06 (2013.01) [B82Y 20/00 (2013.01); B82Y 40/00 (2013.01); G01Q 60/16 (2013.01); G01Q 60/38 (2013.01); G01Q 80/00 (2013.01); Y10S 977/856 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A nano-indent process for creating a single photon emitter in a two-dimensional materials platform, comprising the steps of:
providing a substrate;
providing a layer of polymer on the substrate;
providing a layer of two-dimensional material on the layer of polymer on the substrate;
utilizing a proximal
probe to apply mechanical stress to the layer of two-dimensional material and to the layer of polymer;
deforming the layer of two-dimensional material and the layer of polymer; and
forming a nano-indent in the two-dimensional material;
wherein the nano-indent comprises a single photon emitter.
 
7. A single photon emitter in a two-dimensional materials platform, comprising:
a substrate;
a deformable polymer film on the substrate;
a two-dimensional material on the deformable polymer film; and
a nano-indent in the two-dimensional material and the deformable polymer film;
wherein the nano-indent comprises a permanent and localized strain field formed by application of mechanical stress from a tip of an atomic force microscope to the two-dimensional material and the deformable polymer film; and
wherein the nano-indent exhibits single photon emission in the two-dimensional material.