US 11,705,533 B2
Photosensitive component, x-ray detector and display device
En-tsung Cho, Shenzhen (CN)
Assigned to HKC CORPORATION LIMITED, Shenzhen (CN)
Appl. No. 17/257,632
Filed by HKC CORPORATION LIMITED, Shenzhen (CN)
PCT Filed Dec. 27, 2019, PCT No. PCT/CN2019/129339
§ 371(c)(1), (2) Date Jan. 4, 2021,
PCT Pub. No. WO2020/143487, PCT Pub. Date Jul. 16, 2020.
Claims priority of application No. 201910038703.6 (CN), filed on Jan. 11, 2019.
Prior Publication US 2021/0273128 A1, Sep. 2, 2021
Int. Cl. H01L 31/118 (2006.01); H01L 31/115 (2006.01); G06F 1/16 (2006.01)
CPC H01L 31/118 (2013.01) [G06F 1/1684 (2013.01); H01L 31/115 (2013.01)] 15 Claims
 
1. A photosensitive component, comprising:
an intrinsic layer;
a first doped layer provided on a light incident side of the intrinsic layer; and
a second doped layer provided on a light exit side of the intrinsic layer;
wherein the intrinsic layer, the first doped layer and the second doped layer are all doped with a dopant, and silicon ions are injected into the intrinsic layer, the first doped layer and the second doped layer;
the dopant comprises at least one of SiNx, SiOxCy, SiCx, or SiOxNy; a value of X in SiNx is 0.1 to 1.33; a value of X and a value of Y in SiOxCy are both 0.1 to 1.0, a value of X in SiCx is 0.1 to 1.0, and a value of X in SiOxNy is 0.1 to 1.5 and a value of Y in SiOxNy is 0.1 to 1.3.