CPC H01L 31/118 (2013.01) [G06F 1/1684 (2013.01); H01L 31/115 (2013.01)] | 15 Claims |
1. A photosensitive component, comprising:
an intrinsic layer;
a first doped layer provided on a light incident side of the intrinsic layer; and
a second doped layer provided on a light exit side of the intrinsic layer;
wherein the intrinsic layer, the first doped layer and the second doped layer are all doped with a dopant, and silicon ions are injected into the intrinsic layer, the first doped layer and the second doped layer;
the dopant comprises at least one of SiNx, SiOxCy, SiCx, or SiOxNy; a value of X in SiNx is 0.1 to 1.33; a value of X and a value of Y in SiOxCy are both 0.1 to 1.0, a value of X in SiCx is 0.1 to 1.0, and a value of X in SiOxNy is 0.1 to 1.5 and a value of Y in SiOxNy is 0.1 to 1.3.
|