US 11,705,529 B2
Photodetectors integrated with an inverse taper including a curved tip
Yusheng Bian, Ballston Lake, NY (US); and Asif Chowdhury, Clifton Park, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Dec. 15, 2021, as Appl. No. 17/551,544.
Prior Publication US 2023/0187566 A1, Jun. 15, 2023
Int. Cl. H01L 31/0232 (2014.01); H01L 31/18 (2006.01); H01L 31/0203 (2014.01); H01L 31/101 (2006.01)
CPC H01L 31/02327 (2013.01) [H01L 31/0203 (2013.01); H01L 31/101 (2013.01); H01L 31/18 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure comprising:
a first waveguide core including a first taper;
a semiconductor layer having a sidewall adjacent to the first taper; and
a second waveguide core including a curved section and a second taper that is positioned to overlap with the first taper, the second taper longitudinally positioned between the sidewall of the semiconductor layer and the curved section, and the curved section terminating the second waveguide core.