US 11,705,358 B2
Systems and methods for automated processing ports
Tsung-Sheng Kuo, Hsin-Chu (TW); Yi-Fam Shiu, Hsin-Chu (TW); Eason Chen, Hsin-Chu (TW); Yang-Ann Chu, Hsin-Chu (TW); and Jiun-Rong Pai, Jhubei (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed on Sep. 30, 2019, as Appl. No. 16/588,182.
Claims priority of provisional application 62/751,872, filed on Oct. 29, 2018.
Prior Publication US 2020/0161160 A1, May 21, 2020
Int. Cl. H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01); H01L 23/433 (2006.01); H01L 21/60 (2006.01)
CPC H01L 21/68707 (2013.01) [H01L 21/6773 (2013.01); H01L 21/67294 (2013.01); H01L 21/67706 (2013.01); H01L 23/433 (2013.01); H01L 2021/60105 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system, comprising:
a die vessel;
a processing port with an internal processing port location and an external processing port location;
an actuator configured to move the die vessel between the internal processing port location and the external processing port location, wherein the die vessel comprises a plurality of receptacles, each of the plurality of receptacles configured to hold an unfinished die therein, and wherein when the die vessel is located at the internal processing port location; and
a robot configured to move each of the unfinished dies from a respective receptacle to a port of a semiconductor processing tool,
wherein the actuator comprises:
a conveyor belt configured to move the die vessel container between the internal procession port location and the external processing port location;
a plurality of pulleys configured to rotate and cause movement of the conveyor belt; and
a force sensor coupled to at least one of the pulleys and configured to determine an amount of force exerted by the at least one of the pulleys to move the die vessel container.