US 11,705,352 B2
Base frame of substrate carrier, substrate carrier and substrate transfer mechanism
Qiaodong Li, Chongqing (CN)
Assigned to HKC CORPORATION LIMITED, Shenzhen (CN); and CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD, Chongqing (CN)
Appl. No. 16/979,891
Filed by HKC CORPORATION LIMITED, Shenzhen (CN); and CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD., Chongqing (CN)
PCT Filed Dec. 20, 2018, PCT No. PCT/CN2018/122311
§ 371(c)(1), (2) Date Sep. 11, 2020,
PCT Pub. No. WO2019/174345, PCT Pub. Date Sep. 19, 2019.
Claims priority of application No. 201810199082.5 (CN), filed on Mar. 12, 2018.
Prior Publication US 2021/0028037 A1, Jan. 28, 2021
Int. Cl. H01L 21/67 (2006.01); H01L 21/673 (2006.01); B65G 47/34 (2006.01)
CPC H01L 21/67309 (2013.01) [B65G 47/34 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A base frame of a substrate carrier, comprising:
a first vertical rod and a second vertical rod;
a plurality of cross rods, arranged along a lengthwise direction of the first vertical rod and the second vertical rod, and connected between the first vertical rod and the second vertical rod;
a first vertical rod extension, connected to an end of the first vertical rod from which a substrate enters; and
a second vertical rod extension, connected to an end of the second vertical rod from which the substrate enters; wherein the first vertical rod extension and the second vertical rod extension are configured to accommodate at least one set of rollers for conveying the substrate therebetween.