CPC H01L 21/67309 (2013.01) [B65G 47/34 (2013.01)] | 19 Claims |
1. A base frame of a substrate carrier, comprising:
a first vertical rod and a second vertical rod;
a plurality of cross rods, arranged along a lengthwise direction of the first vertical rod and the second vertical rod, and connected between the first vertical rod and the second vertical rod;
a first vertical rod extension, connected to an end of the first vertical rod from which a substrate enters; and
a second vertical rod extension, connected to an end of the second vertical rod from which the substrate enters; wherein the first vertical rod extension and the second vertical rod extension are configured to accommodate at least one set of rollers for conveying the substrate therebetween.
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