US 11,705,348 B2
Laser light source and a laser crystallization apparatus including the same
Kyong Sik Choi, Asan-si (KR); Dong Hoon Shin, Cheonan-si (KR); Hoon Chul Ryoo, Cheonan-si (KR); Kyeong Mok Kim, Cheonan-si (KR); Jae-Woong Moon, Asan-si (KR); Kyong Ho Park, Paju-si (KR); Ki Hwan Seok, Pohang-si (KR); Myoung Seok Son, Yongin-si (KR); and Hong Ro Lee, Seongnam-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on May 14, 2020, as Appl. No. 16/874,198.
Claims priority of application No. 10-2019-0104692 (KR), filed on Aug. 26, 2019.
Prior Publication US 2021/0066102 A1, Mar. 4, 2021
Int. Cl. H01L 21/67 (2006.01); H01S 5/00 (2006.01); H01L 21/02 (2006.01)
CPC H01L 21/67115 (2013.01) [H01L 21/02675 (2013.01); H01S 5/0071 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A laser light source, comprising:
an airtight container; and
a first resonance mirror and a second resonance mirror outside the airtight container,
wherein the first resonance mirror includes a lens unit and a reflection coating layer, the lens unit includes a first surface and a second surface, the first surface is inclined with respect to the second surface, and the first surface and the second surface are flat surfaces,
the first surface is disposed between the airtight container and the second surface,
the second resonance mirror includes a third surface and a fourth surface, and
the fourth surface is inclined with respect to the third surface.