CPC H01J 37/32944 (2013.01) [H01J 37/32091 (2013.01); H01J 37/3299 (2013.01); H01J 37/32174 (2013.01); H01J 37/32183 (2013.01); H01L 21/67069 (2013.01)] | 25 Claims |
1. A radio-frequency (RF) power generator, comprising:
an output configured to output an RF power signal;
a signal generator to generate an RF input signal;
an RF power stage which receives the RF input signal and generates an amplified RF power signal at its output;
at least one sampler configured to sample the RF signal at the output of the RF power stage;
a controller comprising a digital control portion and an analogue control portion,
an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal from the at least one sampler to be provided to the controller, and
a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal from the at least one sampler to be provided to the controller;
wherein the controller is configured to adjust the RF power signal at the output of the RF generator from a first state into a second state based on the analogue signal representation or the digital signal representation;
and wherein the analogue control portion of the controller is configured to bypass or to override the digital control portion.
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