US 11,705,314 B2
RF power generator with analogue and digital detectors
Anton Labanc, Ehrenkirchen (DE); Daniel Gruner, Muellheim (DE); and André Grede, Bern (CH)
Assigned to COMET AG, Flamatt (CH)
Filed by COMET AG, Flamatt (CH)
Filed on Sep. 9, 2020, as Appl. No. 17/15,139.
Claims priority of application No. 19196359 (EP), filed on Sep. 10, 2019.
Prior Publication US 2021/0074529 A1, Mar. 11, 2021
Int. Cl. H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC H01J 37/32944 (2013.01) [H01J 37/32091 (2013.01); H01J 37/3299 (2013.01); H01J 37/32174 (2013.01); H01J 37/32183 (2013.01); H01L 21/67069 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A radio-frequency (RF) power generator, comprising:
an output configured to output an RF power signal;
a signal generator to generate an RF input signal;
an RF power stage which receives the RF input signal and generates an amplified RF power signal at its output;
at least one sampler configured to sample the RF signal at the output of the RF power stage;
a controller comprising a digital control portion and an analogue control portion,
an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal from the at least one sampler to be provided to the controller, and
a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal from the at least one sampler to be provided to the controller;
wherein the controller is configured to adjust the RF power signal at the output of the RF generator from a first state into a second state based on the analogue signal representation or the digital signal representation;
and wherein the analogue control portion of the controller is configured to bypass or to override the digital control portion.